Monolithic Multi-Wavelength VCSEL Arrays with Uniform Performance by Intra-Cavity Phase Tuning
Paper in proceeding, 2021
We demonstrate monolithic multi-wavelength VCSEL arrays with wavelengths set by intra-cavity phase tuning. Precise channel spacing is achieved by Ar-ion etching. Uniform performance over an array is achieved by spectral matching and balancing of wavelength dependent gain, DBR reflectances and optical confinement factor.
Author
Mehdi Jahed
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Johan Gustavsson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Anders Larsson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Conference Digest - IEEE International Semiconductor Laser Conference
08999406 (ISSN)
27th International Semiconductor Laser Conference, ISLC 2021
Potsdam, Germany,
Potsdam, Germany,
Subject Categories
Telecommunications
Atom and Molecular Physics and Optics
Signal Processing
DOI
10.1109/ISLC51662.2021.9615870