A calibration-free method to assess the quality of standards for THz on-wafer measurements
Paper in proceeding, 2022

A method to assess the quality of the calibration standards has been developed and tested. The actual response of the tested transmission lines for LRRM-16 calibration approach has been simulated in HFSS environment, fabricated, and tested with on-wafer measurement setup. The method for quality assessment is based on the properties of similar matrices, that compares traces and determinants of the S-parameters products for fabricated and simulated structures.

Author

Maxim Masyukov

Aalto University

Irina Nefedova

Aalto University

Aleksi Tamminen

Aalto University

Kimmo Silvonen

Aalto University

Juan Cabello Sánchez

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Mikko Varonen

Technical Research Centre of Finland (VTT)

Mikko Kantanen

Technical Research Centre of Finland (VTT)

Helena Rodilla

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Jan Stake

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Zachary Taylor

Aalto University

International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz

21622027 (ISSN) 21622035 (eISSN)

Vol. 2022-August
9781728194271 (ISBN)

2022 47th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)
Delft, Netherlands,

Areas of Advance

Information and Communication Technology

Infrastructure

Kollberg Laboratory

Subject Categories

Other Engineering and Technologies not elsewhere specified

Electrical Engineering, Electronic Engineering, Information Engineering

DOI

10.1109/IRMMW-THz50927.2022.9895704

More information

Latest update

7/17/2024