A calibration-free method to assess the quality of standards for THz on-wafer measurements
Paper in proceeding, 2022
A method to assess the quality of the calibration standards has been developed and tested. The actual response of the tested transmission lines for LRRM-16 calibration approach has been simulated in HFSS environment, fabricated, and tested with on-wafer measurement setup. The method for quality assessment is based on the properties of similar matrices, that compares traces and determinants of the S-parameters products for fabricated and simulated structures.
Author
Maxim Masyukov
Aalto University
Irina Nefedova
Aalto University
Aleksi Tamminen
Aalto University
Kimmo Silvonen
Aalto University
Juan Cabello Sánchez
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Mikko Varonen
Technical Research Centre of Finland (VTT)
Mikko Kantanen
Technical Research Centre of Finland (VTT)
Helena Rodilla
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Jan Stake
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Zachary Taylor
Aalto University
International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz
21622027 (ISSN) 21622035 (eISSN)
9781728194271 (ISBN)
2022 47th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)
Delft, Netherlands,
Delft, Netherlands,
Areas of Advance
Information and Communication Technology
Infrastructure
Kollberg Laboratory
Subject Categories
Other Engineering and Technologies not elsewhere specified
Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1109/IRMMW-THz50927.2022.9895704