A calibration-free method to assess the quality of standards for THz on-wafer measurements
Paper i proceeding, 2022
A method to assess the quality of the calibration standards has been developed and tested. The actual response of the tested transmission lines for LRRM-16 calibration approach has been simulated in HFSS environment, fabricated, and tested with on-wafer measurement setup. The method for quality assessment is based on the properties of similar matrices, that compares traces and determinants of the S-parameters products for fabricated and simulated structures.
Författare
Maxim Masyukov
Aalto-Yliopisto
Irina Nefedova
Aalto-Yliopisto
Aleksi Tamminen
Aalto-Yliopisto
Kimmo Silvonen
Aalto-Yliopisto
Juan Cabello Sánchez
Chalmers, Mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik
Mikko Varonen
Teknologian Tutkimuskeskus (VTT)
Mikko Kantanen
Teknologian Tutkimuskeskus (VTT)
Helena Rodilla
Chalmers, Mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik
Jan Stake
Chalmers, Mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik
Zachary Taylor
Aalto-Yliopisto
International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz
21622027 (ISSN) 21622035 (eISSN)
Vol. 2022-August9781728194271 (ISBN)
2022 47th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)
Delft, Netherlands,
Delft, Netherlands,
Styrkeområden
Informations- och kommunikationsteknik
Infrastruktur
Kollberglaboratoriet
Ämneskategorier
Övrig annan teknik
Elektroteknik och elektronik
DOI
10.1109/IRMMW-THz50927.2022.9895704