Terahertz Planar Goubau Line Components on Thin Suspended Silicon Substrate
Paper in proceeding, 2022
The planar Goubau line is a low-loss planar single-conductor waveguide that holds promise for terahertz applications, where power efficiency is crucial. We present three circuit elements for planar Goubau line: a stopband filter, a matching load, and a power divider, which have been fabricated in a high-resistivity silicon membrane. Simulation results are presented for the matching load and the power divider. The filter’s performance is validated by comparing measurement results with simulations, showing good agreement.
matched load
power divider
resonator
absorber
silicon membrane
planar waveguides
filter
planar Goubau line
Author
Juan Cabello Sánchez
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Vladimir Drakinskiy
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Jan Stake
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Helena Rodilla
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz
21622027 (ISSN) 21622035 (eISSN)
Vol. 2022-August978-1-7281-9427-1 (ISBN)
2022 47th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)
Delft, Netherlands,
Delft, Netherlands,
Areas of Advance
Information and Communication Technology
Infrastructure
Kollberg Laboratory
Nanofabrication Laboratory
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1109/IRMMW-THz50927.2022.9896069