Electrochemical etching – a key enabler for thin-film VCSELs and LEDs?
Paper in proceeding, 2022
vcsel
led
electrochemical etching
uv
Author
Åsa Haglund
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Filip Hjort
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Johannes Enslin
Technische Universität Berlin
Michael Alexander Bergmann
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Giulia Cardinali
Technische Universität Berlin
Lars Persson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Munise Cobet
Technische Universität Berlin
Nando Prokop
Technische Universität Berlin
Martin Guttmann
Technische Universität Berlin
Luca Sulmoni
Technische Universität Berlin
Neysha Lobo-Ploch
Ferdinand-Braun-Institut fur Hochstfrequenztechnik
Tim Kolbe
Ferdinand-Braun-Institut fur Hochstfrequenztechnik
Johan Gustavsson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Felix Nippert
Technische Universität Berlin
Ines Häusler
Technische Universität Berlin
Markus R. Wagner
Technische Universität Berlin
Joachim Ciers
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Tim Wernicke
Technische Universität Berlin
Michael Kneissl
Technische Universität Berlin
GaN Marathon
Venice, Italy,
Areas of Advance
Nanoscience and Nanotechnology
Materials Science
Subject Categories
Physical Sciences
Other Materials Engineering
Electrical Engineering, Electronic Engineering, Information Engineering
Nano Technology
Infrastructure
Chalmers Materials Analysis Laboratory
Nanofabrication Laboratory