Advances in ultraviolet-emitting vertical-cavity surface-emitting lasers
Paper in proceeding, 2021
electrochemical etching
VCSEL
ultraviolet
Author
Filip Hjort
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Johannes Enslin
Technische Universität Berlin
Munise Cobet
Technische Universität Berlin
Michael Alexander Bergmann
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Joachim Ciers
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Giulia Cardinali
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Tim Kolbe
Ferdinand-Braun-Institut fur Hochstfrequenztechnik
Felix Nippert
Technische Universität Berlin
Markus R. Wagner
Technische Universität Berlin
Johan Gustavsson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Tim Wernicke
Technische Universität Berlin
Michael Kneissl
Technische Universität Berlin
Åsa Haglund
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Proceedings of SPIE - The International Society for Optical Engineering
0277786X (ISSN) 1996756X (eISSN)
Vol. 11686 116860FSan Francisco, USA,
Areas of Advance
Nanoscience and Nanotechnology
Materials Science
Subject Categories
Physical Sciences
Other Materials Engineering
Electrical Engineering, Electronic Engineering, Information Engineering
Nano Technology
Infrastructure
Chalmers Materials Analysis Laboratory
Nanofabrication Laboratory
DOI
10.1117/12.2576044