An Interlaboratory Comparison of On-Wafer S-Parameter Measurements up to 1.1 THz
Journal article, 2025
This paper reports on an interlaboratory measurement comparison involving on-wafer S-parameter measurements from 10 GHz to 1.1 THz. Seven laboratories are involved, and each participant has measured an individual reference substrate fabricated from a high-resistivity silicon wafer in the same batch. One- and two-port co-planar waveguide (CPW) structures are designed, simulated, and fabricated. The measurements from 10 GHz to 1.1 THz, extending across six frequency bands, are conducted using different equipment in terms of vendors and specifications (e.g., probe pitch size). Despite such differences, this interlaboratory study has shown a generally good agreement between results from different participants when uncertainties are considered. The comparison with simulated reference values demonstrates agreement within 0.08 for |S11| and 2 dB for |S21| measurements of matched devices up to 1.1 THz. The measurement comparison demonstrates the need for a standardized measurement approach and, with that, a potential to achieve accurate on-wafer CPW measurements up to THz frequencies, underpinning the development of integrated circuits for such high frequencies.
Calibration
coplanar waveguides (CPW)
comparison
Terahertz metrology
on-wafer
S-parameter measurements
Author
Faisal Mubarak
Dutch National Metrology Institute
Gia Ngoc Phung
Physikalisch-Technische Bundesanstalt (PTB)
Uwe Arz
Physikalisch-Technische Bundesanstalt (PTB)
Kamel Haddadi
University of Lille
Isabelle Roch-Jeune
University of Lille
Guillaume Ducournau
University of Lille
Thomas Flisgen
Brandenburg University of Technology
Ferdinand-Braun-Institut fur Hochstfrequenztechnik
Ralf Doerner
Ferdinand-Braun-Institut fur Hochstfrequenztechnik
Djamel Allal
Laboratoire National De Metrologie Et D'essais (LNE)
Divya Jayasankar
RISE Research Institutes of Sweden
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Jan Stake
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Robin Schmidt
Keysight Technologies, Keysight Laboratories
Gavin Fisher
FormFactor GmbH
Nick Ridler
National Physical Laboratory (NPL)
Xiaobang Shang
National Physical Laboratory (NPL)
IEEE Transactions on Terahertz Science and Technology
2156-342X (ISSN) 21563446 (eISSN)
Vol. 15 3 344-358Subject Categories (SSIF 2025)
Other Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1109/TTHZ.2025.3537461