Microstructural investigations of textured CVD (Al,Ti)N/κ-Al2O3 wear resistant coatings
Review article, 2025

In this work, the deposition of κ-Al2O3 on textured (Al,Ti)N coatings using chemical vapour deposition (CVD) is explored. Two TiN/(Al,Ti)N/κ-Al2O3 coatings with different texture for the (Al,Ti)N layer, 〈111〉 and 〈100〉, have been investigated. The coatings were characterized using X-ray diffraction, scanning electron microscopy, transmission and scanning transmission electron microscopy and energy dispersive X-ray spectroscopy. The κ-Al2O3 layer deposited on the 〈111〉 textured (Al,Ti)N layer has a 〈001〉 texture, while the κ-Al2O3 deposited on the 〈100〉 textured (Al,Ti)N layer shows no clear texture. The difference in κ-Al2O3 texture is driven by the (Al,Ti)N facets available for alumina nucleation. κ-Al2O3 forms on {111} (Al,Ti)N facets, while γ-Al2O3 forms on {100} (Al,Ti)N facets. γ-Al2O3 growth is not stable and is subsequently overgrown by κ-Al2O3. The surface of the 〈100〉 textured (Al,Ti)N layer is dominated by {100} facets, while the surface of the 〈111〉 textured (Al,Ti)N layer is built up of a mixture of {100} and {111} facets. This explains the observed microstructure for the κ-Al2O3 layers in the two coatings. Thus, to optimize the deposition of κ-Al2O3 on (Al,Ti)N, the latter should exhibit {111} facets.

Texture control

CVD

(Al,Ti)N

TEM

Wear-resistant coatings

κ-Al O 2 3

Author

Olof Bäcke

Chalmers, Physics, Microstructure Physics

Henrik Petterson

Dirk Stiens

Walter

Wiebke Janssen

Walter

Johannes Kümmel

Walter

Thorsten Manns

Walter

Hans-Olof Andrén

Chalmers, Physics, Microstructure Physics

Mats Halvarsson

Chalmers, Physics, Microstructure Physics

International Journal of Refractory Metals and Hard Materials

02634368 (ISSN) 22133917 (eISSN)

Vol. 128 107075

Subject Categories (SSIF 2025)

Other Engineering and Technologies

Inorganic Chemistry

Condensed Matter Physics

DOI

10.1016/j.ijrmhm.2025.107075

More information

Latest update

3/5/2025 1