Microfabricated force-sensitive elastic substrates for investigation of mechanical cell-substrate interactions
Journal article, 2003
Photolithography
Silicon wafers
Atomic force microscopy
Oxidation
Scanning electron microscopy
Elasticity
Author
Sarunas Petronis
Chalmers, Applied Physics
Julie Gold
Chalmers, Applied Physics
Bengt Herbert Kasemo
Chalmers, Applied Physics
Journal of Micromechanics and Microengineering
0960-1317 (ISSN) 13616439 (eISSN)
Vol. 13 6 900-913Subject Categories (SSIF 2025)
Physical Sciences
DOI
10.1088/0960-1317/13/6/313