Microfabricated force-sensitive elastic substrates for investigation of mechanical cell-substrate interactions
Artikel i vetenskaplig tidskrift, 2003
Photolithography
Silicon wafers
Atomic force microscopy
Oxidation
Scanning electron microscopy
Elasticity
Författare
Sarunas Petronis
Chalmers, Teknisk fysik
Julie Gold
Chalmers, Teknisk fysik
Bengt Herbert Kasemo
Chalmers, Teknisk fysik
Journal of Micromechanics and Microengineering
0960-1317 (ISSN) 13616439 (eISSN)
Vol. 13 6 900-913Ämneskategorier (SSIF 2025)
Fysik
DOI
10.1088/0960-1317/13/6/313