Comparison of high-resistivity silicon surface passivation methods
Paper in proceedings, 2007

Author

Martin Norling

Chalmers, Applied Physics, Physical Electronics

Dan Kuylenstierna

Chalmers, Applied Physics, Physical Electronics

Andrei Vorobiev

Chalmers, Applied Physics, Physical Electronics

Klaus Reimann

Dimitri Lederer

Jean-Pierre Raskin

Spartak Gevorgian

Chalmers, Applied Physics, Physical Electronics

EuMIC 2007 Proceedings

215-218

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/6/2017