Comparison of high-resistivity silicon surface passivation methods
Paper in proceeding, 2007
Author
Martin Norling
Chalmers, Applied Physics, Physical Electronics
Dan Kuylenstierna
Chalmers, Applied Physics, Physical Electronics
Andrei Vorobiev
Chalmers, Applied Physics, Physical Electronics
Klaus Reimann
Dimitri Lederer
Jean-Pierre Raskin
Spartak Gevorgian
Chalmers, Applied Physics, Physical Electronics
EuMIC 2007 Proceedings
215-218
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering