Method for measuring fracture toughness of wafer-bonded interfaces with high spatial resolution
Paper in proceeding, 2006
Author
Martin Bring
Chalmers, Microtechnology and Nanoscience (MC2)
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2)
Proceedings of Micro Structure Workshop 2006
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering