Martin Bring
Showing 18 publications
Novel monocrystalline silicon micromirrors for maskless lithography
Design and fabrication of hidden hinge monocrystalline silicon micromirrors for maskless lithography
Submicron bond alignment accuracy using through-wafer holes
Calibration methods of force sensors in the micro-Newton range
Novel monocrystalline silicon micromirrors for maskless lithography
Method for measuring fracture toughness of wafer-bonded interfaces with high spatial resolution
Method for measuring fracture toughness of wafer-bonded interfaces with high spatial resolution
Sensors and actuators based on SOI materials
Method for measuring fracture toughness of wafer-bonded interfaces with high spatial resolution
NOVEL METHOD FOR EVALUATING BOND STRENGTH OF VERY SMALL AREAS
Applications of SOI materials to quantum devices and Microsystems
A microdirect methanol fuel cell demonstrator
A micro direct methanol fuel cell demonstrator
MICRO PINBALL GAME DEMONSTRATING AN EASY MEMS TRANSFER PROCESS USING ROOM TEMPERATURE PLASMA BONDING
Applications of plasma assisted wafer bonding
Micro pinball game demonstrating an easy MEMS transfer process using room temperature plasma bonding
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