Micro pinball game demonstrating an easy MEMS transfer process using room temperature plasma bonding
Paper in proceedings, 2002

Author

Martin Bring

Department of Microelectronics

Anke Sanz-Velasco

Department of Microelectronics

Henrik Rödjegård

Peter Enoksson

Department of Microelectronics

Proceedings of the 13th Micromechanics Europe workshop 2002, MME´02 Sinaia, Romania

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/8/2017