Micro pinball game demonstrating an easy MEMS transfer process using room temperature plasma bonding
Paper in proceeding, 2002
Author
Martin Bring
Department of Microelectronics
Anke Sanz-Velasco
Department of Microelectronics
Henrik Rödjegård
Peter Enoksson
Department of Microelectronics
Proceedings of the 13th Micromechanics Europe workshop 2002, MME´02 Sinaia, Romania
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering