Wafer bonding for MEMS
Paper in proceeding, 2005

Author

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Other publications Research

Cristina Rusu

Anke Sanz-Velasco

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Other publications Research

Martin Bring

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Other publications Research

Alexandra Nafari

Chalmers, Microtechnology and Nanoscience (MC2)

Other publications Research

Stefan Bengtsson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Other publications Research

Proceeding of the 9th International Symposium on Semiconductor Wafer Bonding: Science, Technology and Applic, Canadaations, Quebec City

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

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Created

10/7/2017

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