Applications of plasma assisted wafer bonding
Paper in proceedings, 2002

Author

Petra Amirfeiz

Department of Microelectronics

Anke Sanz-Velasco

Department of Microelectronics

Other publications Research

Martin Bring

Department of Microelectronics

Other publications Research

Stefan Bengtsson

Department of Microelectronics

Other publications Research

Proceedings of the Workshop on wafer bonding, Barcelona, Spain

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/6/2017

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