MICRO PINBALL GAME DEMONSTRATING AN EASY MEMS TRANSFER PROCESS USING ROOM TEMPERATURE PLASMA BONDING
Journal article, 2003

Author

Martin Bring

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Anke Sanz-Velasco

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Henrik Rödjegård

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Journal of Micromechanics and Microengineering

0960-1317 (ISSN)

Vol. 13 4 51-56

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/6/2017