Method for measuring fracture toughness of wafer-bonded interfaces with high spatial resolution
Paper in proceeding, 2006
Author
Martin Bring
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Anke Sanz-Velasco
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
proceeding of Eurosensors XX
91-631-9280-2 (ISBN)
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering
ISBN
91-631-9280-2