Microfabrication Technology for All-Metal Sub-mm and THz Waveguide Receiver Components
Paper in proceedings, 2008

A novel technology for manufacturing of micromachined all-metal waveguide circuits and structures for the frequency band from 200 up to 7000 GHz (Sub-Millimeter and THz) is presented. The waveguide circuits are formed using metal electroplating with preceding sputtering of a thin metal film seed layer over a photo-lithographically patterned thick SU-8 photo-resist. The process provides possibility of making 3-dimensional structures via facilitating of multi-level (layered) designs. Surface roughness of the THz waveguide structure was demonstrated to be below 0.1 ┬Ám. This technology was used to build a state-of-the art waveguide balanced 1.3 THz Hot Electron Bolometer mixer and other application for radio astronomy instrumentation.

micromachining

waveguide technology

THz

mixers

Author

Vincent Desmaris

Chalmers, Department of Radio and Space Science, Advanced Receiver Development

Denis Meledin

Chalmers, Department of Radio and Space Science, Advanced Receiver Development

Alexey Pavolotskiy

Chalmers, Department of Radio and Space Science, Advanced Receiver Development

Victor Belitsky

Chalmers, Department of Radio and Space Science, Advanced Receiver Development

In Proceedings of The 19th International Symposium on Space Terahertz Technology, Groningen, 28-30 April, 2008, ed. W. Wild, Space Research Organization of the Netherlands (SRON)

Vol. part I 342-345

Subject Categories

Materials Engineering

Aerospace Engineering

Physical Sciences

Astronomy, Astrophysics and Cosmology

Other Materials Engineering

Other Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/6/2017