Microfabrication Technology for All-Metal Sub-mm and THz Waveguide Receiver Components
Paper i proceeding, 2008

A novel technology for manufacturing of micromachined all-metal waveguide circuits and structures for the frequency band from 200 up to 7000 GHz (Sub-Millimeter and THz) is presented. The waveguide circuits are formed using metal electroplating with preceding sputtering of a thin metal film seed layer over a photo-lithographically patterned thick SU-8 photo-resist. The process provides possibility of making 3-dimensional structures via facilitating of multi-level (layered) designs. Surface roughness of the THz waveguide structure was demonstrated to be below 0.1 µm. This technology was used to build a state-of-the art waveguide balanced 1.3 THz Hot Electron Bolometer mixer and other application for radio astronomy instrumentation.

micromachining

waveguide technology

THz

mixers

Författare

Vincent Desmaris

Chalmers, Institutionen för radio- och rymdvetenskap, Avancerad mottagarutveckling

Denis Meledin

Chalmers, Institutionen för radio- och rymdvetenskap, Avancerad mottagarutveckling

Alexey Pavolotskiy

Chalmers, Institutionen för radio- och rymdvetenskap, Avancerad mottagarutveckling

Victor Belitsky

Chalmers, Institutionen för radio- och rymdvetenskap, Avancerad mottagarutveckling

In Proceedings of The 19th International Symposium on Space Terahertz Technology, Groningen, 28-30 April, 2008, ed. W. Wild, Space Research Organization of the Netherlands (SRON)

Vol. part I 342-345

Ämneskategorier

Materialteknik

Rymd- och flygteknik

Fysik

Astronomi, astrofysik och kosmologi

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Annan elektroteknik och elektronik