Hot Embossed Microoptics in Silicon Micromachining using a Substrate Bonder
Paper in proceeding, 2008
Author
Karin Hedsten
Chalmers, Applied Physics, Electronics Material and Systems
Caglar Ataman
Sven Holmström
Peter Enoksson
Chalmers, Applied Physics, Electronics Material and Systems
Hakan Urey
Proceedings of 19th MicroMechanics Europe Workshop, MME 2008
137-140
978-3-00-025529-8 (ISBN)
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
Other Electrical Engineering, Electronic Engineering, Information Engineering
ISBN
978-3-00-025529-8