Electrostatic feedback for MEMS sensor for in situ TEM instrumentation
Paper in proceeding, 2008
Electrostatic force modeling
Force feedback
Force sensor
Author
Alexandra Nafari
Chalmers, Applied Physics, Electronics Material and Systems
Ning Chang
Johan Angenete
Krister Svensson
Peter Enoksson
Chalmers, Applied Physics, Electronics Material and Systems
Eurosensors 2008
Subject Categories
Condensed Matter Physics