Electrostatic feedback for MEMS sensor for in situ TEM instrumentation
Paper i proceeding, 2008

A capacitive force sensor for in situ TEM instrumentation is investigated. In order to prevent movement of the suspended plate in the capacitive sensor force feedback has been investigated, primarily using CV measurements. A manual feedback has successfully been implemented and an analytical model using a serial and a parallel capacitor is presented.

Electrostatic force modeling

Force feedback

Force sensor

Författare

Alexandra Nafari

Chalmers, Teknisk fysik, Elektronikmaterial och system

Ning Chang

Krister Svensson

Peter Enoksson

Chalmers, Teknisk fysik, Elektronikmaterial och system

Eurosensors 2008

Ämneskategorier

Den kondenserade materiens fysik

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Skapat

2017-10-07