Electrostatic feedback for MEMS sensor for in situ TEM instrumentation
Paper i proceeding, 2008

A capacitive force sensor for in situ TEM instrumentation is investigated. In order to prevent movement of the suspended plate in the capacitive sensor force feedback has been investigated, primarily using CV measurements. A manual feedback has successfully been implemented and an analytical model using a serial and a parallel capacitor is presented.

Electrostatic force modeling

Force feedback

Force sensor


Alexandra Nafari

Chalmers, Teknisk fysik, Elektronikmaterial

Ning Chang

Krister Svensson

Peter Enoksson

Chalmers, Teknisk fysik, Elektronikmaterial

Eurosensors 2008


Den kondenserade materiens fysik

Mer information