Charging phenomena at the interface between high-k dielectrics and SiOx interlayers
Paper in proceeding, 2009
Author
Olof Engström
Chalmers, Applied Physics, Physical Electronics
Bahman Raeissi
Chalmers, Applied Physics, Physical Electronics
Johan Piscator
Chalmers, Applied Physics, Physical Electronics
I. Z. Mitrovic
S. Hall
H. D. B. Gottlob
M. Schmidt
P.K. Hurley
K. Cherkaoui
8th Symposium Diagnostics & Yield Advanced Silicon Devices and Technologies for the ULSI Era, Warsaw, June 22 - 24, 2009 (Invited)
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Other Engineering and Technologies
Other Engineering and Technologies not elsewhere specified