Charging phenomena at the interface between high-k dielectrics and SiOx interlayers
Paper in proceedings, 2009

Author

Olof Engström

Chalmers, Applied Physics, Physical Electronics

Bahman Raeissi

Chalmers, Applied Physics, Physical Electronics

Johan Piscator

Chalmers, Applied Physics, Physical Electronics

I. Z. Mitrovic

S. Hall

H. D. B. Gottlob

M. Schmidt

P.K. Hurley

K. Cherkaoui

8th Symposium Diagnostics & Yield Advanced Silicon Devices and Technologies for the ULSI Era, Warsaw, June 22 - 24, 2009 (Invited)

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Created

10/7/2017