Microreplication in a Silicon Processing Compatible Material
Paper in proceedings, 2005

We present a novel fabrication process for the integration of polymer micro-optical elements on silicon. The process relies on a reverse order protocol based on embossing in an amorphous fluorocarbon polymer, Cytop™.

Author

Jonas Melin

Uppsala University

Karin Hedsten

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Anders Magnusson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

David Karlén

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Henrik Rödjegård

Imego AB - The Institute of Micro and Nanotechnology

Katrin Persson

Imego AB - The Institute of Micro and Nanotechnology

Jörgen Bengtsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Fredrik Nikolajeff

Uppsala University

IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications, Oulu, Finland, 1-4 August 2005

89-90

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

DOI

10.1109/OMEMS.2005.1540091

ISBN

978-078039278-6

More information

Latest update

3/28/2018