Replicated diffractive optical element in silicon micromachining
Paper in proceeding, 2004
Author
Karin Hedsten
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Anders Magnusson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Jonas Melin
Henrik Rödjegård
Gert Andersson
Jörgen Bengtsson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Fredrik Nikolajeff
David Karlén
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Micromechanics Europe (MME04) (Leuven, Belgium, 2004)
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering