Replication of continuous-profiled micro-optical elements for silicon integration
Journal article, 2006
Author
Karin Hedsten
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Anders Magnusson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Jonas Melin
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Jörgen Bengtsson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Fredrik Nikolajeff
David Karlén
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Henrik Rödjegård
Gert Andersson
Applied Optics
Vol. 45 1 83-89
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering