Effect of an inhomogeneous insulating film on the capacitance of metal-insulator-semiconductor structures

Anders Jauhiainen; David Westberg; Stefan Bengtsson

Effect of an inhomogeneous insulating film on the capacitance of metal-insulator-semiconductor structures
Journal article, 1998

Author

Anders Jauhiainen

Department of Solid State Electronics

David Westberg

Stefan Bengtsson

Department of Solid State Electronics

Other publications Research

Journal Of Applied Physics

Vol. 84 7 3960-3965

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

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10/7/2017

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Effect of an inhomogeneous insulating film on the capacitance of metal-insulator-semiconductor structures Journal article, 1998