Refractive lenses in silicon micromachining by reflow of amorphous fluorocarbon polymer
Journal article, 2006

Author

Karin Hedsten

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Other publications Research

David Karlén

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Other publications Research

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Other publications Research

Jörgen Bengtsson

Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics

Other publications Research

Jornal of Micromechanics and Microengineering

Vol. 16 6 S88-S95

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/6/2017

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