A new method of determining the effective channel width and its dependence on the gate voltage
Paper in proceeding, 1996
A novel and simple method for the extraction of the effective channel width and its dependence on the gate voltage is presented. Both synthetic and measured data have been used to evaluate the new method which is superior to previous methods in not assuming any particular width or gate voltage dependencies of the series resistance.
Electrical resistance measurement
Geometry
Robustness
Solid state circuits
Data mining
Performance evaluation
Particle measurements
Integrated circuit measurements
Voltage
Fluctuations
Author
Peter R. Karlsson
Department of Solid State Electronics
Kjell Jeppson
Department of Microelectronics and Nanoscience
Department of Solid State Electronics
Anders Bogren
Department of Solid State Electronics
Proceedings of the IEEE International Conference on Microelectronic Test Structures ICMTS
Vol. 1996 25-28 March 1996
0-7803-2783-7 (ISBN)
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1109/ICMTS.1996.535637