Low-resistance Si/Ti/Al/Ni/Au multilayer ohmic contacts to undoped AlGaN/GaN heterostructures
Journal article, 2004
Author
Vincent Desmaris
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Joakim Eriksson
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Niklas Rorsman
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Herbert Zirath
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Electrochemical and Solid-State Letters
Vol. 7 4 G72-
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering