Analysis of CV characterisitcs of plasma bonded wafers

Cindy Colinge; Stefan Bengtsson; Petra Amirfeiz; Anke Sanz-Velasco

Analysis of CV characterisitcs of plasma bonded wafers
Paper in proceeding, 2002

Author

Cindy Colinge

Stefan Bengtsson

Department of Microelectronics

Other publications Research

Petra Amirfeiz

Department of Microelectronics

Anke Sanz-Velasco

Other publications Research

Presented at TMS, Electronics Materials Conference, Santa Barbara, USA

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/6/2017

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Analysis of CV characterisitcs of plasma bonded wafers Paper in proceeding, 2002