Silicon Based Flow Sensors for Mean Velocity and Turbulence Measurements

Artikel i vetenskaplig tidskrift, 1992

Small and directional sensitive silicon based sensors for velocity measurements have been designed and fabricated using microelectronic technology. Single-chip as well as double-chip sensors for the determination of mean velocity and turbulent stresses have been developed. To determine the performance of these silicon sensors, comparisons with conventional hot-wire sensors were done in a well-defined two-dimensional flat plate boundary layer at a constant Reynolds number of 4.2*106. All the silicon sensors were found to have spatial and frequency resolution that makes them suitable for turbulence measurements. In the studied flow field the measured profiles of mean velocities and Reynolds stresses of all silicon sensors show the same accuracy and corresponding hot-wire measurements. The silicon sensors are also shown to operate with good resolution even when the temperature of the heated part of the chip is reduced considerably.