Application of calixarene for nanometer magnetic particle fabrication
Paper i proceeding, 2000

An application of the negative tone electron beam resist Calixarene for fabrication of nanometer magnetic particles is reported. Thorough resist characterisation is performed. Proximity tests for characterization of the intraproximity behaviour of the resist on the tested substrate is investigated to compensate for modulation of lateral dimensions due to electron scattering. Magnetic particles were fabricated by a combination of EBL and ion beam milling using Calixarene as a transfer layer down to Fe. We fabricated arrays of circular particles with characteristic dimensions down to 40 nm. Initial results of topographic and magnetic force microscopy are reported

ferromagnetic materials

sputter etching

magnetic particles

iron

electron resists

magnetic force microscopy

atomic force microscopy

proximity effect (lithography)

nanotechnology

particle size

nanostructured materials

arrays

surface topography

Författare

Piotr Jedrasik

Institutionen för mikroelektronik och nanovetenskap

Maj Hanson

Chalmers, Institutionen för experimentell fysik, Fasta tillståndets fysik

Bengt Nilsson

Institutionen för mikroelektronik och nanovetenskap

Microelectronic Engineering

0167-9317 (ISSN)

Vol. 53 497-500

Styrkeområden

Nanovetenskap och nanoteknik

Materialvetenskap

Ämneskategorier

Den kondenserade materiens fysik

DOI

10.1016/S0167-9317(00)00364-6