Spinodal decomposition of Ti0.33Al0.67N thin films studied by atom probe tomography
Artikel i vetenskaplig tidskrift, 2012

Details of the phase decomposition in NaCl-structure Ti0.33Al0.67N thin films deposited by cathodic arc evaporation are studied by atom probe tomography. We demonstrate that as-deposited films are in the earliest stage of decomposition for which electron microscopy and x-ray diffraction indicate a single-phase solid solution. Annealing at 900 degrees C further activates spinodal decomposition of the films, although pockets of unde-composed material remain after 2 h. N preferentially segregates to the AlN and TiN domains, causing the TiAlN matrix to be understoichiometric, by the energetics of N vacancies in TiAlN. The corresponding modulation in stoichiometry implies a Kirkendall effect, caused by different Al and Ti diffusivities.

target

Atom probe tomography

fe-cr alloys

Spinodal decomposition

ti1-xalxn

specimen preparation

performance

computer-models

level

Titanium aluminum nitride

deposition

microstructure

nitride films

Författare

L. J. S. Johnson

Linköpings universitet

Mattias Thuvander

Chalmers, Teknisk fysik, Materialens mikrostruktur

Chalmers, Teknisk fysik, Mikroskopi och mikroanalys

Krystyna Marta Stiller

Chalmers, Teknisk fysik, Materialens mikrostruktur

Chalmers, Teknisk fysik, Mikroskopi och mikroanalys

M. Oden

Linköpings universitet

L. Hultman

Linköpings universitet

Thin Solid Films

0040-6090 (ISSN)

Vol. 520 13 4362-4368

Ämneskategorier

Fysik

Styrkeområden

Materialvetenskap

DOI

10.1016/j.tsf.2012.02.085