Spinodal decomposition of Ti0.33Al0.67N thin films studied by atom probe tomography
Journal article, 2012
Details of the phase decomposition in NaCl-structure Ti0.33Al0.67N thin films deposited by cathodic arc evaporation are studied by atom probe tomography. We demonstrate that as-deposited films are in the earliest stage of decomposition for which electron microscopy and x-ray diffraction indicate a single-phase solid solution. Annealing at 900 degrees C further activates spinodal decomposition of the films, although pockets of unde-composed material remain after 2 h. N preferentially segregates to the AlN and TiN domains, causing the TiAlN matrix to be understoichiometric, by the energetics of N vacancies in TiAlN. The corresponding modulation in stoichiometry implies a Kirkendall effect, caused by different Al and Ti diffusivities.
target
Atom probe tomography
fe-cr alloys
Spinodal decomposition
ti1-xalxn
specimen preparation
performance
computer-models
level
Titanium aluminum nitride
deposition
microstructure
nitride films
Author
L. J. S. Johnson
Linköping University
Mattias Thuvander
Chalmers, Applied Physics, Materials Microstructure
Chalmers, Applied Physics, Microscopy and Microanalysis
Krystyna Marta Stiller
Chalmers, Applied Physics, Materials Microstructure
Chalmers, Applied Physics, Microscopy and Microanalysis
M. Oden
Linköping University
L. Hultman
Linköping University
Thin Solid Films
0040-6090 (ISSN)
Vol. 520 13 4362-4368Subject Categories
Physical Sciences
Areas of Advance
Materials Science
DOI
10.1016/j.tsf.2012.02.085