Design, fabrication and measurements with a UV Linear-Variable Optical Filter microspectrometer
Paper i proceeding, 2012

An IC-Compatible Linear-Variable Optical Filter (LVOF) for application in the UV spectral range between 310 nm and 400 nm has been fabricated using resist reflow and an optimized dry-etching. The LVOF is mounted on the top of a commercially available CMOS camera to result in a UV microspectrometer. A special calibration technique has been employed that is based on an initial spectral measurement on a Xenon lamp. The image recorded on the camera during calibration is used in a signal processing algorithm to reconstruct the spectrum of the Mercury lamp and the calibration data is subsequently used in UV spectral measurements. Experiments on fabricated LVOF-based microspectrometer with this calibration approach implemented reveal a spectral resolution of 0.5 nm.

Linear Variable Filter

UV spectrometer



A. Emadi

Technische Universiteit Delft

H. Wu

Technische Universiteit Delft

G. De Graaf

Technische Universiteit Delft

Peter Enoksson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

J. H. Correia

Universidade do Minho

R. F. Wolffenbuttel

Technische Universiteit Delft

Proceedings of SPIE - The International Society for Optical Engineering

0277786X (ISSN)

Vol. 8439 Art. no. 84390V- 84390V


Nanovetenskap och nanoteknik




Elektroteknik och elektronik