Compliant Substrate
Kapitel i bok, 2012

This chapter provides an overview of compliant substrate, its theoretical concept, and practical implementation methods. The concept was originally proposed to offer a versatile technology beyond the limitation of lattice mismatch that has been encountered in most heterostructures. Different fabrication schemes to prepare compliant substrates in various materials are reviewed and assessed. Although there have been plenty of evidence showing reduction of threading dislocations (TDs) using a compliant substrate, its physical origin is still under debate.

Författare

Shu Min Wang

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

Lattice Engineering Technology and Applications

63-97

Styrkeområden

Informations- och kommunikationsteknik

Nanovetenskap och nanoteknik

Materialvetenskap

Ämneskategorier

Materialteknik

Nanoteknik

DOI

10.4032/9789814364256

ISBN

978-981-4316-29-3