µFab: The Swedish Micro- and Nanofabrication Network
Konferensbidrag (offentliggjort, men ej förlagsutgivet), 2006

Sweden holds a very strong position in microstructure technology (MST). During the last decades universities, research institutes and commercial enterprises have all contributed to cover the entire field from academic research to industrial production. A key factor in this development has been, and still is, the availability of state-of-the-art process facilities, with the three large cleanrooms at Chalmers, KTH and Uppsala University at the top-of-the-line. These laboratories have now entered into a collaborative network, µFab or the Swedish Micro- and Nanofabrication Network, an open user facility and an excellent resource for education, research and industrial development. More than 50 % of the technical presentations at this workshop (MSW 2006) is based on laboratory work within the µFab network.

MyFab

Electrum Laboratory

Nanofabrication Laboratory

MC2

Ångström Microstructure Laboratory

Författare

Stefan Nygren

Jan Stake

Chalmers, Mikroteknologi och nanovetenskap (MC2), Mikrovågselektronik

Chalmers, Mikroteknologi och nanovetenskap (MC2), Mikrovågs- och terahertzteknologi

Nils Nordell

Micro Structure Workshop

65-

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Annan elektroteknik och elektronik