Sodium enhanced oxidation: Absence of shallow interface traps after removal of sodium ions from the SiO2/4H-SiC interface
Artikel i vetenskaplig tidskrift, 2013

We investigate the strong passivation of shallow interface traps located near the SiC conduction band after enhanced oxidation of Si-face 4H-SiC in the presence of sodium. We find that removing the sodium ions present at the SiO2/SiC interface since oxidation by way of bias stress or annealing does not lead to a significant increase in the density of interface traps. The presence of sodium ions at the SiO2/SiC interface is therefore not responsible for the passivation of such interface traps in oxides formed by sodium enhanced oxidation.

Sodium enhanced oxidation

TDRC

Interface states

MOS

Författare

P.G. Hermannsson

Háskóli Íslands

Fredrik Allerstam

Chalmers, Mikroteknologi och nanovetenskap (MC2), Mikrovågselektronik

S. Hauksson

Háskóli Íslands

E. O. Sveinbjornsson

Háskóli Íslands

Materials Science Forum

0255-5476 (ISSN)

Vol. 740-742 749-752

Ämneskategorier

Materialteknik

DOI

10.4028/www.scientific.net/MSF.740-742.749

ISBN

9783037856246