Structural properties of GeSn thin films grown by molecular beam epitaxy
Artikel i vetenskaplig tidskrift, 2017

GeSn thin films on Ge (001) with various Sn concentrations from 3.36 to 7.62% were grown by molecular beam epitaxy and characterized. The structural properties were analyzed by reciprocal space mapping in the symmetric (004) and asymmetric (224) planes by high resolution X-ray diffraction (XRD). The lateral correlation length (LCL) and the mosaic spread (MS) were extracted for the epi-layer peaks in the asymmetric (224) diffraction. With the increase of Sn concentration, the LCL reduces while the MS increases, indicating degrading crystalline quality. Dislocations were observed in the sample with 7.62% Sn concentration by transmission electron microscope, consistent with the strain relaxation found in XRD mapping. Besides, the surface morphologies were investigated.

Författare

Z. P. Zhang

ShanghaiTech University

Chinese Academy of Sciences

Y. X. Song

Chinese Academy of Sciences

Z. Y. S. Zhu

Chinese Academy of Sciences

ShanghaiTech University

Y. Han

Chinese Academy of Sciences

Q. M. Chen

Chinese Academy of Sciences

Y. Li

Chinese Academy of Sciences

L. Y. Zhang

Chinese Academy of Sciences

Shu Min Wang

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

AIP Advances

2158-3226 (ISSN)

Vol. 7 Article number 045211- 045211

Styrkeområden

Nanovetenskap och nanoteknik

Ämneskategorier

Nanoteknik

DOI

10.1063/1.4982245