Si-based InGaAs photodetectors on heterogeneous integrated substrate
Artikel i vetenskaplig tidskrift, 2021

In this paper, InGaAs p-i-n photodetectors (PDs) on an InP/SiO2/Si (InPOI) substrate fabricated by ion-slicing technology are demonstrated and compared with the identical device on a commercial InP substrate. The quality of epitaxial layers on the InPOI substrate is similar to that on the InP substrate. The photo responsivities of both devices measured at 1.55 µm are comparable, which are about 0.808–0.828 A W−1. Although the dark current of PD on the InPOI substrate is twice as high as that of PD on the InP substrate at 300 K, the peak detectivities of both PDs are comparable. In general, the overall performance of the InPOI-based PD is comparable to the InP-based PD, demonstrating that the ion-slicing technology is a promising route to enable the high-quality Si-based InP platform for the full photonic integration on a Si substrate.

InPOI

molecular beam epitaxy

72.80.Ey

73.40.Kp

InGaAs photodetector

71.20.Nr

72.40.+w

monolithic integration

42.82.−m

Författare

Chaodan Chi

Chinese Academy of Sciences

Jiajie Lin

China Nanhu Academy of Electronics and Information Technology

Chinese Academy of Sciences

Xingyou Chen

Chinese Academy of Sciences

Chengli Wang

Chinese Academy of Sciences

Ziping Li

Chinese Academy of Sciences

Liping Zhang

Chinese Academy of Sciences

Zhanglong Fu

Chinese Academy of Sciences

Xiaomeng Zhao

Chinese Academy of Sciences

HUA LI

Chinese Academy of Sciences

Tiangui You

Chinese Academy of Sciences

L. Yue

Chinese Academy of Sciences

Jiaxiang Zhang

Chinese Academy of Sciences

Niefeng Sun

China Nanhu Academy of Electronics and Information Technology

China Electronic Technology Group Corporation

Peng Gao

Tianjin Institute of Power Sources

R Kudrawiec

Politechnika Wrocławska

Shu Min Wang

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

Xin Ou

Chinese Academy of Sciences

Science China: Physics, Mechanics and Astronomy

1674-7348 (ISSN)

Vol. 64 6 267311

Ämneskategorier

Övrig annan teknik

Biomedicinsk laboratorievetenskap/teknologi

Annan elektroteknik och elektronik

DOI

10.1007/s11433-020-1673-1

Mer information

Senast uppdaterat

2021-07-02