Fabrication of micro-bump array using a photosensitive conductive polymer for the integration of micro-light-emitting diode displays
Artikel i vetenskaplig tidskrift, 2024

Background: Recently, micro-light-emitting diode (micro-LED) displays have gained significant interest from both industry and academia due to their exceptional performance. However, the integration of micro-LED with the driver substrate during the fabrication process remains a pressing issue that needs to be addressed. Aim: We plan to realize high-yield bonding of micro-LED displays by adopting new materials. Approach: We opted for a photoresist with conductive properties by incorporating carbon black as the bonding material to fabricate a micron-level bump array. Results: This method, using only photolithography, achieves a yield of 99.99% or higher in a single step. It eliminates the need for time-consuming processes such as lift-off and vaporization in the traditional metal bump preparation process. The resulting array can be directly used to establish electrical connections with the micro-LED array. After fabrication of the bump array on the thin film transistor (TFT) driver substrate, the 80x80 micro-LED array was integrated into the TFT substrate, and after baking, a device yield of over 99.9% was attained. Conclusions: This work presents a streamlined and more effective method for integrating the micro-LED and TFT driver substrate, resulting in significant reductions in both time and economic expenses associated with the production process of micro-LED displays. (c) 2024 Society of Photo-Optical Instrumentation Engineers (SPIE)

micro-bump array

micro-light-emitting diode display

carbon black

photosensitive conductive polymer

Författare

Xueqi Zhu

Fuzhou University

Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China

Taifu Lang

Fuzhou University

Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China

Xin Lin

Fuzhou University

Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China

Xiaowei Huang

Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China

Fuzhou University

Yujie Xie

Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China

Fuzhou University

Yang Li

Fuzhou University

Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China

Yijian Zhou

Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China

Fuzhou University

Yifan Yang

Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China

Fuzhou University

Chang Lin

Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China

Fuzhou University

Jie Sun

Chalmers, Mikroteknologi och nanovetenskap, Kvantkomponentfysik

Xiongtu Zhou

Fuzhou University

Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China

Tailiang Guo

Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China

Fuzhou University

Qun Yan

Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China

Fuzhou University

Journal of Micro/ Nanolithography, MEMS, and MOEMS

1932-5150 (ISSN) 1932-5134 (eISSN)

Vol. 23 4 044901

Ämneskategorier (SSIF 2011)

Textil-, gummi- och polymermaterial

Annan materialteknik

Annan elektroteknik och elektronik

DOI

10.1117/1.JMM.23.4.044901

Mer information

Senast uppdaterat

2025-01-13