On-chip angle-scanning scattering microscopy with all-dielectric metasurfaces and surface-emitting lasers

Paper i proceeding, 2025

Here, we propose a miniaturized imaging system based on integrating scattered light spatial frequencies under angled illumination. We employ spatially arranged verticalcavity surface-emitting lasers to configure the azimuthal beam rotation. This, integrated with silicon and gallium arsenide metasurfaces, facilitates fast biological specimens imaging beyond the classical diffraction limit.