Integration of diffractive, refractive and plasmonic optical structures in highly functional MEMS-based scanning and biosensing systems
Doktorsavhandling, 2009
localized surface plasmon resonance
replication
vertical-cavity surface-emitting laser
protein binding
silicon micromachining
polymer micro¬lens
biosensing
MEMS
diffractive microoptics
MOEMS
reflow
Författare
Karin Hedsten
Chalmers, Teknisk fysik, Elektronikmaterial
Hot Embossed Microoptics in Silicon Micromachining using a Substrate Bonder
Proceedings of 19th MicroMechanics Europe Workshop, MME 2008,; (2008)p. 137-140
Paper i proceeding
MEMS-based VCSEL beam steering using replicated polymer diffractive lens
Sensors and Actuators, A: Physical,; Vol. 142(2008)p. 336-345
Artikel i vetenskaplig tidskrift
Supporting structures for transmissive optical components in MEMS
17th MicroMechanics Europe (MME06) (Southampton, UK, Sept. 3-5, 2006),; (2006)p. 69-72
Paper i proceeding
Replication of continuous-profiled micro-optical elements for silicon integration
Applied Optics,; Vol. 45(2006)p. 83-89
Artikel i vetenskaplig tidskrift
Refractive lenses in silicon micromachining by reflow of amorphous fluorocarbon polymer
Jornal of Micromechanics and Microengineering,; Vol. 16(2006)p. S88-S95
Artikel i vetenskaplig tidskrift
Microreplication in a silicon processing compatible polymer material
Jornal of Micromechanics and Microengineering,; Vol. 15(2005)p. 116-121
Artikel i vetenskaplig tidskrift
Ämneskategorier
Annan industriell bioteknik
Annan elektroteknik och elektronik
ISBN
978-91-7385-228-9
Technical report MC2 - Department of Microtechnology and Nanoscience, Chalmers University of Technology: 133
Doktorsavhandlingar vid Chalmers tekniska högskola. Ny serie: 2909
Kollektorn (A423) MC2-huset, Kemivägen 9, Göteborg
Opponent: Dr. Reinoud Wolffenbuttel