XPS calibration study of thin-film nickel silicides
Journal article, 2009
Wagner plot
XPS
Ni silicides
depth profile
Auger parameter
core level
Author
Yu Cao
Chalmers, Materials and Manufacturing Technology, Surface and Microstructure Engineering
Lars Nyborg
Chalmers, Materials and Manufacturing Technology, Surface and Microstructure Engineering
Urban Paul Einar Jelvestam
Chalmers, Materials and Manufacturing Technology, Surface and Microstructure Engineering
Surface and Interface Analysis
0142-2421 (ISSN) 1096-9918 (eISSN)
Vol. 41 6 471-483Subject Categories
Manufacturing, Surface and Joining Technology
DOI
10.1002/sia.3050