MEMS sensor for in situ TEM-nanoindentation with simultaneous force and current measurements
Paper in proceeding, 2009

Nanoindentation is a material testing method frequently used for studies of mechanical properties on the nano scale. Today, nanoindentation is also performed in situ a Transmission Electron Microscope (TEM), in order to simultaneously monitor the substrate with high resolution imaging. Here we present an extension of TEM-Nanoindention, utilizing custom designed MEMS sensor for in situ TEM use that enables simultaneous force and current measurements. The sensor is intended to be operated in electrostatic feedback mode and enable ultra high resolution TEM imaging. The design and fabrication of the sensor is presented here. Preliminary measurements show that the fabrication has been successful.

capacitive detection

current measurement

force sensor

situ TEM



Alexandra Nafari

Krister Svensson

Anke Sanz-Velasco

Chalmers, Applied Physics, Electronics Material and Systems

Peter Enoksson

Chalmers, Applied Physics, Electronics Material and Systems

MicroMechanics Europe 2009


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Other Electrical Engineering, Electronic Engineering, Information Engineering

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