MEMS sensor for in situ TEM-nanoindentation with simultaneous force and current measurements
Paper in proceeding, 2009
capacitive detection
current measurement
force sensor
situ TEM
Nanoindentation
Author
Alexandra Nafari
Krister Svensson
Anke Sanz-Velasco
Chalmers, Applied Physics, Electronics Material and Systems
Peter Enoksson
Chalmers, Applied Physics, Electronics Material and Systems
MicroMechanics Europe 2009
4-
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering