Inductively Coupled Plasma Etching of GaN Mesa Structures for Microphotoluminescence
Paper in proceedings, 2003

Author

Toshio Kawahara

Fredrik Fälth

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Xinju Liu

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Thorvald Andersson

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Vincent Desmaris

Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics

Proceedings of the 2nd IMP3 conference

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/7/2017