Inductively Coupled Plasma Etching of GaN Mesa Structures for Microphotoluminescence
Paper in proceeding, 2003
Author
Toshio Kawahara
Fredrik Fälth
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Xinju Liu
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Thorvald Andersson
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Vincent Desmaris
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Proceedings of the 2nd IMP3 conference
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering