MEMS sensor for in situ TEM-nanoindentation with simultaneous force and current measurements
Journal article, 2010

A capacitive force sensor for in situ transmission electron microscope (TEM)-nanoindentation with simultaneous force and current measurement has been developed. The sensor was fabricated using bulk micro machining methods such as deep reactive ion etch, thermal oxidation, metal deposition and anodic bonding. Two different geometries of the sensor were designed to allow in situ TEM electromechanical experiments in the most common TEM instruments. Electrical probing is enabled by an on-chip insulator, electrically separating the indenter tip and the capacitor used for force measurements. The sensor was designed for the force range of 0 to 4.5 mN. Finally, we demonstrate for the first time in situ TEM-nanoindentation with simultaneous force and current measurements.

Author

Alexandra Nafari

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

J. Angenete

Nanofactory Instruments

Krister Svensson

Karlstad University

Anke Sanz-Velasco

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

Peter Enoksson

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

Journal of Micromechanics and Microengineering

0960-1317 (ISSN)

Vol. 20 6

Areas of Advance

Transport

Production

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

DOI

10.1088/0960-1317/20/6/064017

More information

Latest update

9/6/2018 1