MEMS sensor for in situ TEM-nanoindentation with simultaneous force and current measurements
Journal article, 2010
Author
Alexandra Nafari
Chalmers, Applied Physics, Electronics Material and Systems
J. Angenete
Nanofactory Instruments
Krister Svensson
Karlstad University
Anke Sanz-Velasco
Chalmers, Applied Physics, Electronics Material and Systems
Peter Enoksson
Chalmers, Applied Physics, Electronics Material and Systems
Journal of Micromechanics and Microengineering
0960-1317 (ISSN) 13616439 (eISSN)
Vol. 20 6 064017Areas of Advance
Transport
Production
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1088/0960-1317/20/6/064017