MEMS sensor for in situ TEM-nanoindentation with simultaneous force and current measurements
Journal article, 2010
Author
Alexandra Nafari
Chalmers, Applied Physics, Electronics Material and Systems Laboratory
J. Angenete
Nanofactory Instruments
Krister Svensson
Karlstad University
Anke Sanz-Velasco
Chalmers, Applied Physics, Electronics Material and Systems Laboratory
Peter Enoksson
Chalmers, Applied Physics, Electronics Material and Systems Laboratory
Journal of Micromechanics and Microengineering
0960-1317 (ISSN)
Vol. 20 6Areas of Advance
Transport
Production
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1088/0960-1317/20/6/064017