Submillimeter Wave S-Parameter Characterization of Integrated Membrane Circuits
Journal article, 2011

We demonstrate S-parameter characterization of membrane circuits in the WR-03 frequency band (220-325 GHz) utilizing thru-reflect-line (TRL) -calibration technique. The TRL calibration kit design features 3 μm thick GaAs membrane circuits packaged in E-plane split waveguide blocks with the reference planes inside the membrane circuit structure. A 300 GHz membrane ring resonator filter circuit has been characterized by applying the proposed calibration kit, showing good agreement with simulations.

Monolithic integrated circuits

Membranes

THz circuits

Calibration.

Scattering parameter measurements

Submillimete wave measurements

Author

Huan Zhao Ternehäll

GigaHertz Centre

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Aik-Yean Tang

GigaHertz Centre

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Peter Sobis

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

GigaHertz Centre

Tomas Bryllert

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Jörgen Stenarson

Jan Stake

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

GigaHertz Centre

IEEE Microwave and Wireless Components Letters

1531-1309 (ISSN)

Vol. 21 2 110-112 5711413

Areas of Advance

Information and Communication Technology

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

Infrastructure

Nanofabrication Laboratory

DOI

10.1109/LMWC.2010.2097244

More information

Created

10/7/2017