Submillimeter Wave S-Parameter Characterization of Integrated Membrane Circuits
Journal article, 2011
We demonstrate S-parameter characterization of membrane circuits in the WR-03 frequency band (220-325 GHz) utilizing thru-reflect-line (TRL) -calibration technique. The TRL calibration kit design features 3 μm thick GaAs membrane circuits packaged in E-plane split waveguide blocks with the reference planes inside the membrane circuit structure. A 300 GHz membrane ring resonator filter circuit has been characterized by applying the proposed calibration kit, showing good agreement with simulations.
Scattering parameter measurements
THz circuits
Membranes
Calibration.
Monolithic integrated circuits
Submillimete wave measurements
Author
Huan Zhao Ternehäll
GigaHertz Centre
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Aik-Yean Tang
GigaHertz Centre
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Peter Sobis
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
GigaHertz Centre
Tomas Bryllert
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Klas Yhland
Jörgen Stenarson
Jan Stake
GigaHertz Centre
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
IEEE Microwave and Wireless Components Letters
1531-1309 (ISSN) 15581764 (eISSN)
Vol. 21 2 110-112 5711413Areas of Advance
Information and Communication Technology
Infrastructure
Kollberg Laboratory
Nanofabrication Laboratory
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
Other Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.1109/LMWC.2010.2097244